Fast optical switch and its applications in optical communication

ABSTRACT

A fast optical (with or without a photonic crystal) switch is fabricated/constructed, utilizing a phase transition material/Mott insulator, activated by either an electrical pulse (a voltage pulse or a current pulse) and/or a light pulse and/or pulses in terahertz (THz) frequency of a suitable field strength and/or hot electrons. The applications of such a fast optical switch for an on-demand optical add-drop subsystem, integrating with (a) a light slowing/light stopping component (based on metamaterials and/or nanoplasmonic structures) and (b) with or without a wavelength converter are also described.

CROSS REFERENCE OF RELATED APPLICATIONS

The present Patent Application is a continuation-in-part (CIP) of

(a) U.S. Non-Provisional patent application Ser. No. 15/932,404 entitled, “FAST OPTICAL SWITCH AND ITS APPLICATIONS IN OPTICAL COMMUNICATION”, filed on Feb. 26, 2018, which resulted in a U.S. Pat. No. 10,185,202, on Jan. 22, 2019,

-   -   wherein (a) is a continuation-in-part (CIP) of (b) U.S.         Non-Provisional patent application Ser. No. 15/731,683 entitled,         “FAST OPTICAL SWITCH AND ITS APPLICATIONS IN OPTICAL         COMMUNICATION”, filed on Jul. 17, 2017 (wherein (b) claims the         benefit of priority from U.S. Provisional Patent Application No.         62/498,246 entitled, “FAST OPTICAL SWITCH AND ITS APPLICATIONS         IN OPTICAL COMMUNICATION”, filed on Dec. 20, 2016), which         resulted in a U.S. Pat. No. 10,009,670 on Jun. 26, 2018,     -   wherein (b) is a continuation-in-part (CIP) of (c)         Non-Provisional patent application Ser. No. 14/756,096 entitled,         “FAST OPTICAL SWITCH AND ITS APPLICATIONS IN OPTICAL         COMMUNICATION”, filed on Aug. 1, 2015, (wherein (c) claims the         benefit of priority from U.S. Provisional Patent Application No.         61/999,601 entitled, “FAST OPTICAL SWITCH”, filed on Aug. 1,         2014), which resulted in a U.S. Pat. No. 9,746,746 on Aug. 29,         2017.

The entire contents of all U.S. Non-Provisional Patent applications and U.S. Provisional Patent applications as listed in the previous paragraph and the filed (patent) Application Data Sheet (ADS) are hereby incorporated by reference.

FIELD OF THE INVENTION

The present invention generally relates to an optical switch and its applications in optical communication. In optical communication, an optical switch enables optical signals to be selectively switched from one optical fiber/optical circuit to another optical fiber/optical circuit. An optical switch can operate by mechanical, electro-optic or magneto-optic effects.

BACKGROUND OF THE INVENTION

The lithium niobate (LiNbO₃)-LN or (Pb,La)(Zr,Ti)O₃-PLZT or optical waveguide-based optical switch is commercially available. The LN/PLZT optical waveguide-based optical switch is a modified balance bridge type 1×2 switch, which is composed of (a) a Mach-Zehnder (MZ) device integrated with top electrodes and (b) input-output 3-dB couplers.

The switching speed of an LN optical waveguide-based optical switch is approximately 100 nanoseconds. Furthermore, it suffers from (a) high voltage requirements, (b) polarization dependence problems and (c) DC drift.

The switching speed of a PLZT optical waveguide-based optical switch is approximately 10 nanoseconds.

The switching speed of a semiconductor optical amplifier (SOA) waveguide-based optical switch is about 1 to 2 nanoseconds. However, the semiconductor optical amplifier waveguide-based optical switch suffers from (a) noise, (b) polarization dependence problems, (c) wavelength dependence problems and (d) high electrical power consumption.

SUMMARY OF THE INVENTION

In view of the foregoing, three objectives of the present invention are:

-   -   to design and fabricate/construct an optical switch with a         switching speed less than 10 nanoseconds;     -   to reduce (a) noise, (b) polarization dependence problems, (c)         wavelength dependence problems and (d) high electrical power         consumption; and     -   to create a platform to integrate/co-package other optical         components.

Applications for such an optical switch with a switching speed less than 10 nanoseconds are:

Optical Communication

-   -   Optical Packet Switches;     -   Optical Add-Drop Subsystem For Optical Packets;     -   Switched Passive Optical Networks (S-PON);

Computing

-   -   High Performance Cloud Computers;     -   High Performance Data Centers; and     -   Optical Interconnects.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A illustrates an embodiment of a fast optical switch in a directional coupler configuration based on vanadium dioxide (VO₂) ultra-thin-film activated by an electrical pulse just to induce an insulator-to-metal phase transition (IMT) in vanadium dioxide ultra-thin-film.

FIG. 1B illustrates a cross-sectional view of two metal electrodes on vanadium dioxide ultra-thin-film on the left region of the fast optical switch in the directional coupler configuration.

FIG. 1C illustrates a cross-sectional view of two metal electrodes on vanadium dioxide ultra-thin-film on the right region of the fast optical switch in the directional coupler configuration.

FIG. 1D illustrates an embodiment of three-optical waveguides based directional coupler.

FIG. 1E illustrates an embodiment of a directional coupler utilizing a photonic crystal.

FIG. 1F illustrates an embodiment of an optical switch, based on Mach-Zehnder interferometer.

FIG. 2 illustrates an embodiment of an electronic subsystem to drive the fast optical switch based on vanadium dioxide ultra-thin-film activated by an electrical pulse.

FIG. 3 illustrates an embodiment of a fast optical switch processor A comprising the fast optical switch (based on vanadium dioxide ultra-thin-film activated by an electrical pulse) in a matrix configuration.

FIG. 4 illustrates an embodiment of the fast optical switch based on vanadium dioxide ultra-thin-film activated by a light pulse just to induce an insulator-to-metal phase transition in vanadium dioxide ultra-thin-film.

FIG. 5 illustrates an embodiment of an electronic subsystem to drive the fast optical switch based on vanadium dioxide ultra-thin-film activated by a light pulse.

FIG. 6 illustrates an embodiment of a fast optical switch processor B comprising the fast optical switch (based on vanadium dioxide ultra-thin-film activated by a light pulse) in a matrix configuration.

FIG. 7 illustrates an on-demand optical add-drop subsystem (OADS) integrated with the fast optical switch (wherein the fast optical switch is based on vanadium dioxide ultra-thin-film activated by an electrical pulse).

FIG. 8 illustrates an embodiment of an electronic subsystem to drive the on-demand optical add-drop subsystem integrated with the fast optical switch (wherein the fast optical switch is based on vanadium dioxide ultra-thin-film activated by an electrical pulse).

FIG. 9 illustrates an embodiment of an optical network processor system A comprising the on-demand optical add-drop subsystem in a matrix configuration (wherein the on-demand optical add-drop subsystem further comprises the fast optical switch based on vanadium dioxide ultra-thin-film activated by an electrical pulse).

FIG. 10 illustrates an on-demand optical add-drop subsystem integrated with the fast optical switch (wherein the fast optical switch is based on vanadium dioxide ultra-thin-film activated by a light pulse).

FIG. 11 illustrates an embodiment of an electronic subsystem to drive the on-demand optical add-drop subsystem integrated with the fast optical switch (wherein the fast optical switch is based on vanadium dioxide ultra-thin-film activated by a light pulse).

FIG. 12 illustrates an embodiment of an optical network processor system B, comprising the on-demand optical add-drop subsystem in a matrix configuration (wherein the on-demand optical add-drop subsystem further comprises the fast optical switch based on vanadium dioxide ultra-thin-film activated by a light pulse).

FIG. 13A illustrates an embodiment of a wavelength converter based on a nonlinear four-wave mixing material.

FIG. 13B illustrates another embodiment of a wavelength converter based on another nonlinear four-wave mixing material.

FIG. 13C illustrates another embodiment of a wavelength converter based on another nonlinear four-wave mixing material.

FIG. 14 illustrates an on-demand optical add-drop subsystem integrated with the fast optical switch (wherein the fast optical switch is based on vanadium dioxide ultra-thin-film activated by an electrical pulse) and a wavelength converter.

FIG. 15 illustrates an embodiment of an electronic subsystem to drive the on-demand optical add-drop subsystem integrated with the fast optical switch (wherein the fast optical switch is based on vanadium dioxide ultra-thin-film activated by an electrical pulse) and the wavelength converter.

FIG. 16 illustrates an embodiment of an advanced optical network processor system C comprising the on-demand optical add-drop subsystem in a matrix configuration (wherein the on-demand optical add-drop subsystem further comprises the fast optical switch based on vanadium dioxide ultra-thin-film activated by an electrical pulse) and the wavelength converter.

FIG. 17 illustrates an on-demand optical add-drop subsystem integrated with the fast optical switch (wherein the fast optical switch is based on vanadium dioxide ultra-thin-film activated by a light pulse) and the wavelength converter.

FIG. 18 illustrates an embodiment of an electronic subsystem to drive the on-demand optical add-drop subsystem integrated with the fast optical switch (wherein the fast optical switch is based on vanadium dioxide ultra-thin-film activated by a light pulse) and the wavelength converter.

FIG. 19 illustrates an embodiment of an advanced optical network processor system D comprising the on-demand optical add-drop subsystem in a matrix configuration (wherein the on-demand optical add-drop subsystem further comprises the fast optical switch based on vanadium dioxide ultra-thin-film activated by a light pulse) and the wavelength converter.

DETAILED DESCRIPTION OF THE DRAWINGS

Vanadium dioxide is broadly related to phase transition/Mott insulator material. Vanadium dioxide exhibits rapid (less than 10 nanoseconds) insulator-to-metal phase transition upon temperature increase. Vanadium dioxide shows an abrupt decrease of resistance when applied current or voltage exceeds a certain threshold value. This is an electric field-induced rapid phase transition.

The rapid (less than 10 nanoseconds) insulator-to-metal phase transition can be utilized in conjunction with a coupled waveguide configuration (e.g., a directional coupler/multi-mode interference (MMI) coupler or Mach-Zehnder interferometer) to fabricate/construct a fast optical switch.

The operational principle of a directional coupler is evanescent wave coupling, where two single-mode waveguides come close to each other along a coupling length.

The dimension of the coupling length can depend on other parameters (e.g., overall dimension and switching speed of the optical switch). Furthermore, extinction ratio/power transfer ratio can depend on the index mismatch and the coupling parameters and the state of 120—the vanadium dioxide ultra-thin-film.

FIG. 1A illustrates an embodiment of 100A—a fast optical switch (in the directional coupler design) based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse. The electrical pulse can be a voltage/current pulse.

100A—the fast optical switch (in the directional coupler design) can be fabricated/constructed on a silicon-on-insulator (SOI) substrate.

But, other suitable substrate (e.g., a silicon-on-sapphire (SOS) substrate or a diamond-on-insulator (DOI)) can also be utilized.

An electrical pulse can be a current pulse or a voltage pulse. 120—the vanadium dioxide ultra-thin-film is receiving a voltage pulse or a current pulse via two electrodes just to induce an insulator-to-metal phase transition in the vanadium dioxide ultra-thin-film. For example, a square wave-shaped voltage pulse with a rise time of approximately 10 nanoseconds and a fall time of approximately 10 nanoseconds with a pulse duration of 500 nanoseconds can be utilized.

It should be noted that the insulator-to-metal phase transition with corresponding electrical and optical properties can be with or without any change/deformation in lattice structure of the vanadium dioxide.

In FIG. 1A, 100A denotes the fast optical switch and 120 denotes vanadium dioxide ultra-thin-film. 140A denotes the left region and 140B denotes the right region. 160A1 denotes the left metal electrode on 120—the vanadium dioxide ultra-thin-film (on 140A—the left region) and 160A2 denotes the right metal electrode on 120—the vanadium dioxide ultra-thin film (on 140A—left region). 160B1 denotes the left metal electrode on 120—the vanadium dioxide ultra-thin-film (on 140B—the right region) and 160B2 denotes the right metal electrode on 120—the vanadium dioxide ultra-thin-film (on 140B—the right region).

It should be noted that 120—the vanadium dioxide ultra-thin-film can also be deposited in the curved region other than 140A—the left region and 140B—the right region.

It should be noted that 120—the vanadium dioxide ultra-thin-film can also be deposited on an intermediate layer of ultra-thin-film of a semiconductor (e.g., silicon-germanium (Si—Ge)) or insulating material (e.g., aluminum dioxide). The intermediate layer of ultra-thin-film of a semiconductor is generally of same length of 120—the vanadium dioxide ultra-thin-film

200—an optical waveguide on 140A—the left region can be based on silicon or silicon nitride or a suitable (optical) low-loss material.

200—the optical waveguide on 140A—the left region can be coupled with either a one-dimensional (1-D) or a two-dimensional (2-D) photonic crystal (of air/silica filed holes) generally in the coupling region to slow light propagation to increase light-material interaction. The one-dimensional or two-dimensional photonic crystal can be modeled by a finite-difference time-domain (FDTD) method (e.g., utilizing MEEP).

The one-dimensional or two-dimensional photonic crystal (generally in the coupling region) can reduce the length of 120—the vanadium dioxide ultra-thin-film and electrical power consumption during optical switching.

200—the optical waveguide on 140B—the right region can be based on silicon or silicon nitride or a suitable (optical) low-loss material. 200—the optical waveguide can be coupled with either the one-dimensional or two-dimensional photonic crystal (generally in the coupling region) to slow light propagation.

It should be noted that 200—the optical waveguide on 140A—the left region can have different vertical height/thickness/depth with respect to 200—the optical waveguide on 140A—the right region.

Furthermore, it should be noted that 200—the optical waveguide on 140A—the left region can have different horizontal width with respect to 200—the optical waveguide on 140A—the right region.

It should be noted that in some design applications, 120—the vanadium dioxide ultra-thin film is not on 140A—the left region and 140B—the right region, rather suitably on a separate optical waveguide in the gap between the 140A—the left region and 140B—the right region to reduce optical loss and cross-talk.

This separate optical waveguide in the gap between the 140A—the left region and 140B—the right region can have different vertical height/thickness/depth and/or different horizontal width.

This separate optical waveguide in the gap between the 140A—the left region and 140B—the right region can be coupled with either the one-dimensional or two-dimensional photonic crystal (of air/silica filed holes) generally in the coupling region to slow light propagation to increase light-material interaction.

120—the vanadium dioxide ultra-thin-film can be a single section or multiple sections.

120—the vanadium dioxide ultra-thin-film can also comprise gratings of the vanadium dioxide material.

The vertical height/thickness/depth of 120—the vanadium dioxide ultra-thin-film is less than 1 micron. In many configurations, it generally ranges from 0.1 microns to 0.5 microns.

120—the vanadium dioxide ultra-thin-film is approximately in the range of 0.01 microns² to 2 microns² in area on 140A—the left region.

120—the vanadium dioxide ultra-thin-film is approximately in the range of 0.01 microns² to 2 microns² in area on 140B—the right region.

It should be noted that by nanoscaling the area (or even volume) of 120—the vanadium dioxide ultra-thin-film in the range of approximately 0.01 microns², an ultra-fast (approximately 1-2 nanoseconds) optical switch (activated by an electrical pulse) can be realized, provided all parameters such as insertion loss, return loss, cross-talk and extinction ratio are optimized.

The ridge (horizontal) width and ridge depth of 200—the optical waveguide in 140A—the left region are approximately in the range of 0.2 microns to 5 microns and 0.1 microns to 1 micron respectively. Furthermore, both ends of 200—the optical waveguide in 140A—the left region can be tapered out gradually (and also antireflection coated at both ends of 200—the optical waveguide in 140A—the left region) for optical mode matching for a higher percentage of single-mode optical fiber coupling. Additionally, both ends of 200—the optical waveguide in 140A—the left region can be fabricated/constructed with vertically coupled gratings for optical mode matching for a higher percentage of single-mode optical fiber coupling.

The ridge (horizontal) width and ridge depth of 200—the optical waveguide in 140B—the right region are approximately in the range of 0.2 microns to 5 microns and 0.1 microns to 1 micron respectively. Furthermore, both ends of 200—the optical waveguide in 140B—the right region can be tapered out gradually (and antireflection coated at both ends of 200—the optical waveguide in 140B—the right region) for optical mode matching for a higher percentage of single-mode optical fiber coupling.

The distance between 140A—the left region and 140B—the right region is less than 5 microns.

100A—the fast optical switch is a 2×2 fast optical switch with two inputs and two outputs.

The fabrication process of 100A—the fast optical switch (in a directional coupler design) is outlined below, when 120—the vanadium dioxide is an ultra-thin-film.

Deposition of 120—the vanadium dioxide ultra-thin-film (polycrystalline) of less than 0.5 microns in thickness by radio frequency (RF) magnetron sputtering from vanadium dioxide target under argon gas flow (approximately 100 sccm) and oxygen gas flow (approximately 10 sccm) at approximately in the range of 300 degrees centigrade to 550 degrees centigrade on a silicon-on-insulator substrate, having a silicon layer thickness of approximately in the range of 0.1 microns to 0.5 microns, having an insulator (silicon dioxide) layer thickness of approximately in the range of 0.25 microns to 3 microns, having a substrate thickness of approximately in the range of 350 microns to 675 microns.

Alternatively, direct current (DC) magnetron sputtering from vanadium target under a suitable argon gas flow rate and oxygen gas flow rate at approximately in the range of 300 degrees centigrade to 550 degrees centigrade can be utilized to deposit 120—the vanadium dioxide ultra-thin-film.

Alternatively, electron beam evaporation or laser-assisted electron beam evaporation from a high purity form of divanadium tetroxide (V₂O₄) powder can be utilized to deposit 120—the vanadium dioxide ultra-thin-film.

Alternatively, a low-temperature atomic layer epitaxial (ALE) process can be utilized to deposit 120—the vanadium dioxide ultra-thin-film.

Alternatively, a low-temperature molecular beam epitaxy (MBE) process can be utilized to deposit 120—the vanadium dioxide ultra-thin-film.

Additionally, a thermal annealing/rapid thermal annealing (RTA) process under a suitable argon gas flow rate and oxygen gas flow rate can be utilized to enhance grain size and correct any oxygen deficiency of 120—the vanadium dioxide ultra-thin-film (polycrystalline).

Additionally, an ultra-thin-film aluminum oxide in the range of 0.010 microns to 0.015 microns in thickness as a buffer layer prior to any deposition of 120—the vanadium dioxide ultra-thin-film can lead to improved crystallinity and textures in 120—the vanadium dioxide ultra-thin-film.

Additionally, an ultra-thin-film aluminum oxide in the range of 0.010 microns to 0.015 microns in thickness as a protection layer after to any deposition of 120—the vanadium dioxide ultra-thin-film can lead to improved surface protection of 120—the vanadium dioxide ultra-thin-film.

120—the vanadium dioxide ultra-thin-film can be stoichiometric undoped vanadium dioxide or doped (e.g., germanium or tungsten) vanadium dioxide, wherein doping can change (a) the thermal conductivity, (b) phase transition temperature, or (c) ON/OFF ratio/profile of electrical conductivity of 120—the vanadium dioxide ultra-thin-film.

120—the vanadium dioxide ultra-thin-film can be replaced by another phase transition material/Mott insulator material (e.g., niobium oxide (niobium monoxide NbO/niobium dioxide NbO₂/niobium pentoxide Nb₂O₅).

120—the vanadium dioxide ultra-thin-film can be replaced by a phase change material (e.g., Ge₂Sb₂Te₅ (GST) or Ge₂Sb₂Se₄Te₁ (GSST)), wherein the phase can be changed by applying a short burst of heat, supplied electrically and/or optically.

Alternatively, 120—the vanadium dioxide ultra-thin-film can be replaced by an ultra-fast switching phase change material amorphous Ag₄In₃Sb₆₇Te₂₆ (AIST), wherein the phase can be changed in an extremely short time scale (sub-picoseconds) by applying short bursts of heat, supplied electrically and/or optically or by pulses in terahertz frequency of a suitable field strength.

A few picoseconds duration electric pulses of a suitable electric field strength or a few picoseconds duration of pulses in terahertz frequency of a suitable field strength can be utilized to excite amorphous Ag₄In₃Sb₆₇Te₂₆ for threshold switching. Field-dependent reversible changes in conductivity/pulse-driven crystallization/threshold switching can be observed in sub-picoseconds time scale.

Ultra-short (e.g., 1 picosecond) and terahertz pulses of a suitable field strength across a pair of nano antennas (e.g., metal nano antennas) can create an electric field induced phase change in a phase change material with limited joule heating.

Reactive ion or ion etching of 120—the vanadium dioxide ultra-thin-film and the silicon layer (of the silicon-on-insulator substrate) to approximately in the range of 0.2 microns to 5 microns in horizontal width and approximately in the range of 0.1 microns to 1 micron in depth to form 200—an optical waveguide in 140A—the left region and its continued curved structure can be realized. Furthermore, both ends of 200—the optical waveguide can be tapered out gradually (and also antireflection coated at both ends of 200—the optical waveguide in 140A—the left region) for optical mode matching for a higher percentage of single-mode optical fiber coupling. Additionally, both ends of 200—the optical waveguide in 140A—the left region can be fabricated/constructed with vertically coupled gratings for optical mode matching for a higher percentage of single-mode optical fiber coupling.

Similarly, reactive ion or ion etching of 120—the vanadium dioxide ultra-thin-film and the silicon layer (of the silicon-on-insulator substrate) to approximately in the range of 0.2 microns to 5 microns in horizontal width and approximately in the range of 0.1 microns to 1 micron in depth to form 200—an optical waveguide in 140B—the right region and its continued curved structure can be realized. Furthermore, both ends of 200—the optical waveguide can be tapered out gradually (and also antireflection coated at both ends of 200—the optical waveguide in 140B—the right region) for optical mode matching for a higher percentage of single-mode optical fiber coupling. Additionally, both ends of 200—the optical waveguide in 140A—the left region can be fabricated/constructed with vertically coupled gratings for optical mode matching for a higher percentage of single-mode optical fiber coupling.

Electron beam lithography and lift off of:

-   -   a first metal layer of titanium/chromium/palladium and a second         metal layer of gold for 160A1—the left metal electrode and         160A2—the right metal electrode on 120—the vanadium dioxide         ultra-thin-film (on 140A—the left region); and     -   the first metal layer of titanium/chromium/palladium and the         second metal layer of gold for 160B1—the left metal electrode         and 160B2—the right metal electrode on 120—the vanadium dioxide         ultra-thin-film (on 140B—the right region).

The thickness of the first metal layer of titanium/chromium/palladium is approximately in the range of 0.010 microns to 0.02 microns.

The thickness of the second metal layer of gold is approximately in the range of 0.25 microns to 0.35 microns. It should be noted that thickness of the second metal layer of gold can be optimized to reduce stress on 120—the vanadium dioxide ultra-thin-film in mitigating stability/reliability issues with 120—the vanadium dioxide ultra-thin-film.

Alternatively, the first metal can be a combination of an adhesion promoting metal (e.g., titanium/chromium) in the range of 0.005 microns in thickness and a ultra-thin metal (e.g., gold) in the range of 0.010 microns in thickness, wherein the said first metal can be fabricated as nansocaled island of about 50 nanometers in diameter. The first metal can be electrically coupled with two metal electrodes of the second metal of an adhesion promoting metal (e.g., titanium) in the range of 0.015 microns in thickness and a ultra-thin metal (e.g., aluminum) in the range of 0.25 to 0.35 microns in thickness, wherein the two metal electrodes are separated by a nanoscaled gap (e.g., 20 nanometers to 100 nanometers). This arrangement can inject hot electrons into 120—the vanadium dioxide ultra-thin-film for ultrafast (less than 1-2 nanoseconds) optical switching. Alternatively, hot electrons can be injected into 120—the vanadium dioxide ultra-thin-film for ultrafast (less than 1-2 nanoseconds) optical switching by photo-excitation.

Furthermore, a high dielectric constant insulator (e.g., hafnium silicate, zirconium silicate, hafnium dioxide and zirconium dioxide) of approximate thickness of 0.005 microns can be fabricated/constructed to electrically insulate two electrodes on 140A—the left region and two electrodes on 140B—the right region from 120—the vanadium dioxide ultra-thin-film.

In some design applications, indium tin oxide (ITO) (with refractive index between 1.2 and 1.8) as transparent electrodes can be considered.

Alternatively, a parallel plate capacitor with an air gap can be utilized instead of the high dielectric constant insulator. When a voltage pulse is applied across electrodes on a parallel plate capacitor, an electric field due to the voltage pulse is established across the air gap and a smaller electric field due to the voltage pulse is then coupled with 120—the vanadium dioxide ultra-thin-film.

Additionally, 100A—the optical switch can be coupled with an optical filter or a ring resonator or a laser (including utilizing monolithic integration of a device quality III-V material on silicon u-grooves of about 100 nanometers pitch by hetero-epitaxy).

Additionally, 100A—the optical switch can be coupled with one or more semiconductor amplifiers/optical attenuators to compensate for an optical loss/gain respectively, which can be actively controlled utilizing one or more waveguide photodiodes. Furthermore, one or more semiconductor amplifiers can be replaced by one or more erbium doped waveguide amplifiers.

100A—the optical switch can be maintained at a suitable temperature by a thermoelectric cooler (TEC).

It should be noted that the above fabrication steps can be modified in a number of ways (e.g., self alignment and/or planarization) for not heating adjacent silicon, as heating adjacent silicon can undesirably slow the switching speed of 100A—the optical switch.

100A—the optical switch can be flip-chip mounted on a nanoscaled fin array and/or a heat spreader (e.g., a synthetic diamond heat spreader/single crystal boron arsenide (BAs) heat spreader) to spread accumulated heat for faster OFF switching time.

The nanoscaled fin array is an ordered array of nanoscaled metal (e.g., aluminum/gold) pillars/posts within a thermally conducting layer (e.g., alumina).

Dicing, testing and single-mode optical fiber pigtailing of 100A—the fast optical switch chips can be realized.

Connecting the tested/pigtailed good 100A—the fast optical switch chips onto a printed electronics circuit board can be realized.

In FIG. 1A, 180A denotes a first input port of an input wavelength and 180B denotes a second input port of an input wavelength. 200 denotes the optical waveguide. The input wavelength at 180A—the first input port can exit via 220A—an output exit, when 140A—the left region comprising 120—the vanadium dioxide ultra-thin-film is not electrically activated by an electrical pulse on both 160A1—the left metal electrode and 160A2—the right metal electrode on 120—the vanadium dioxide ultra-thin-film (on 140A—the left region).

However, the input wavelength at 180A—the first input port can exit via 220B—an output exit, when 140A—the left region comprising 120—the vanadium dioxide ultra-thin-film is electrically activated by an electrical pulse on both 160A1—the left metal electrode and 160A2—the right metal electrode on 120—the vanadium dioxide ultra-thin-film (on 140A—the left region) just to induce an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film.

Similarly, the input wavelength at 180B—the second input port can exit via 200A—an output exit, when 140B—the right region comprising the 120—the vanadium dioxide ultra-thin-film is electrically activated by an electrical pulse on both 160B1—the left metal electrode and 160B2—the right metal electrode on 120—the vanadium dioxide ultra-thin-film (on 140B—the right region) just to induce an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film.

120—the vanadium dioxide ultra-thin-film is receiving an electrical pulse just to induce an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film.

Other coupler designs (e.g., multimode interference or Mach-Zehnder interferometer) can be realized by using an electrical pulse for inducing an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film.

However, an insulator-to-metal phase transition can be with a change in lattice structure or without a change in lattice structure (without a change in lattice structure can minimize any joule heating and thus, can enable an ultrafast optical switch even in picoseconds/femtoseconds).

It should be noted that a cluster of vanadium dioxide particles (less than 0.5 microns in diameter) embedded in an ultra-thin-film of a polymeric material or in a mesh of metal nanowires can be utilized instead of 120—the vanadium dioxide ultra-thin-film in fabricating/constructing 100A—the fast optical switch activated by an electrical pulse. The polymeric material can be either conducting, semiconducting or non-conducting. Thus, vanadium dioxide particles (less than 0.5 microns in diameter) embedded in an ultra-thin-film of a polymeric material or in a mesh of metal nanowires can receive an electrical pulse just to induce an insulator-to-metal phase transition in the cluster of vanadium dioxide particles (less than 0.5 microns in diameter).

Furthermore, 120—the vanadium dioxide ultra-thin-film can be replaced by a monolayer(s) of a two-dimensional material (e.g., germanene, graphene, phosphorene, silicene and stanene) first, then followed by the vanadium dioxide ultra-thin-film last (option 1) or the vanadium dioxide ultra-thin-film first, then followed by a monolayer(s) of a two-dimensional material last (option 2) or a monolayer(s) of a two-dimensional material first then followed by the vanadium dioxide ultra-thin-film in the middle, then followed by a monolayer(s) of a two-dimensional material last (option 3). Integration of a monolayer(s) of a two-dimensional material can enable faster heat dissipation and/or electronic properties of the entire stacked materials for faster off switching time. The total vertical height/thickness/depth of the vanadium dioxide ultra-thin-film and a monolayer(s) of a two-dimensional material is still less than 1 micron. It should be noted that the two-dimensional material and/or vanadium dioxide can be in the form a quantum dot(s). It should be noted that vanadium dioxide can also be doped or undoped, as described in previous paragraphs.

FIG. 1B illustrates a cross-sectional view of 160A1—the left metal electrode and 160A′2—the right metal electrode on 120—the vanadium dioxide ultra-thin-film (on 140A—the left region), wherein 120—the vanadium dioxide ultra-thin-film is on the silicon layer of the silicon-on-insulator substrate. 200 denotes the optical waveguide.

FIG. 1C illustrates a cross-sectional view of 160B1—the left metal electrode and 160B2—the right metal electrode on 120—the vanadium dioxide ultra-thin-film (140B—the right region), wherein 120—the vanadium dioxide ultra-thin-film is on the silicon layer of the silicon-on-insulator substrate. 200 denotes the optical waveguide.

Furthermore, the silicon layer of the silicon-on-insulator substrate can be reactive ion or ion etched up to the silica layer of the silicon-on-insulator substrate.

FIG. 1D illustrates an embodiment of three-optical waveguides based directional coupler, wherein the middle optical waveguide (including 120—the vanadium dioxide ultra-thin-film with electrical bias electrodes (electrical bias electrodes are not shown in the FIG. 1D) controls the optical coupling between the first optical waveguide and third optical waveguide.

FIG. 1E illustrates an embodiment of a directional coupler utilizing a photonic crystal.

The size of a hole and periodicity of a photonic crystal can be simulated for a particular application, utilizing MEEP software program.

The ratio of a hole radius to a lattice constant (of a photonic crystal) can range from 0.3 to 0.4. Furthermore, a photonic crystal can be either symmetrically or asymmetrically designed and filled with silicon dioxide (rather than air holes).

FIG. 1F illustrates an embodiment of an optical switch, based on Mach-Zehnder interferometer (including 120—the vanadium dioxide ultra-thin-film with electrical bias electrodes (electrical bias electrodes are not shown in the FIG. 1F) on each arm of the Mach-Zehnder interferometer. The Mach-Zehnder interferometer includes an input 3-dB coupler and an output 3-dB coupler.

Metamaterials and/or nanoplasmonic structures endowed with special negative refractive index properties, surrounded by normal materials with positive refractive index properties, as a light (or optical signal(s)) slowing/light (or optical signal(s)) buffering component can slow (even stop) light/optical signal(s) at either input or output of 100A—the fast optical switch (based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse) for optical processing without any optical-electrical-optical (O-E-O) conversion to read header information of an optical (internet) packet optically. Thus, this can enable an all-optical network.

Furthermore, the wavelength or frequency or color of a composite light (or composite optical signal(s)) can slow (even stop) at different spatial points (of metamaterials and/or nanoplasmonic structures endowed with special negative refractive index properties, surrounded by normal materials with positive refractive index properties) to have a trapped effect.

Furthermore, a nanowire of a nonlinear material (e.g., cadmium sulfide) wrapped by a dielectric material, then wrapped by a silver shell at either input or output of 100A—the fast optical switch (based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse) can change the wavelength or frequency or color of light that passes through it. By confining light within the nonlinear material rather than at the interface between the nonlinear material and the silver shell, light intensity can be maximized, while changing the wavelength or frequency or color of light that passes through it.

Additionally, by applying an electric field across a nanosccaled ring of a nonlinear material (e.g., cadmium sulfide), mixing of optical signals at high on or off ratio can be obtained. Such mixing of optical signals at high on or off ratio can act as an optical transistor.

FIG. 2 illustrates an embodiment of 300A—an electronic subsystem to drive 100A—the fast optical switch (based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse).

In FIG. 2, 240 denotes an external controller, 260 denotes a microprocessor/field programmable gate array (FPGA) and 280A denotes a drive electronics unit/module for 100A—the fast optical switch.

300A—the electronic subsystem integrates 240, 260 and 280A. 300A—the electronic subsystem is to drive 100A—the fast optical switch.

240—the external controller can communicate serially with 260—the microprocessor/field programmable gate array.

FIG. 3 illustrates an embodiment of 400A—a fast optical switch processor A, comprising 100A—the fast optical switch in a matrix configuration (wherein 100A—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse just to induce an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film).

In FIG. 3, 400A denotes a fast optical switch processor A; 200 denotes the optical waveguide; 320 denotes an input single-mode optical fiber array; 300A denotes the electronic subsystem to drive 100A—the fast optical switch (based on 120—the vanadium dioxide ultra-thin film activated by an electrical pulse); 340 denotes a thermoelectric cooler to maintain 400A—the fast optical switch processor A at a specified temperature; 360 denotes a heat sink and 380 denotes an output single-mode optical fiber array.

Thus, 400A—the fast optical switch processor A can switch a wavelength from any input fiber to any output fiber in less than 10 nanoseconds.

FIG. 4 illustrates an embodiment of 100B—a fast optical switch (in the directional coupler configuration) based on the 120—the vanadium dioxide ultra-thin-film, activated by a light pulse, on a silicon-on-insulator substrate.

In FIG. 4, 100B denotes a fast optical switch, 120 denotes vanadium dioxide ultra-thin-film. 140A denotes the left region and 140B denotes the right region.

The vertical height/thickness/depth of 120—the vanadium dioxide ultra-thin-film is less than 0.5 microns.

120—the vanadium dioxide ultra-thin-film is approximately in the range of 0.01 microns² to 2 microns² in area on 140A—the left region.

120—the vanadium dioxide ultra-thin-film is approximately in the range of 0.01 microns² to 2 microns² in area on 140B—the right region.

It should be noted that by nanoscaling the area of 120—the vanadium dioxide ultra-thin-film in the range of approximately 0.01 microns², an ultrafast (approximately 1-2 nanoseconds) optical switch (activated by a light pulse or pulses in terahertz frequency of a suitable field strength) can be realized.

Ultra-short (e.g., 1 picosecond) and terahertz pulses of a suitable field strength across a pair of nano antennas (e.g., metal nano antennas) can create an electric field induced insulator to metal phase transition in a phase transition material with limited joule heating.

Also, utilizing the insulator-to-metal phase transition without any change/deformation in lattice structure of the vanadium dioxide, an ultra-fast (approximately 0.1 nanoseconds) optical switch (activated by a light pulse or pulses in terahertz frequency of a suitable field strength) can be realized by eliminating any nanoscaled joule heating.

The ridge (horizontal) width and ridge depth of 200—the optical waveguide in 140A—the left region are approximately in the range of 0.2 microns to 5 microns and 0.1 microns to 1 micron respectively. Furthermore, both ends of 200—the optical waveguide in 140A—the left region can be tapered out gradually (and also antireflection coated at both ends of 200—the optical waveguide in 140A—the left region) for optical mode matching for a higher percentage of single-mode optical fiber coupling. Additionally, both ends of 200—the optical waveguide in 140A—the left region can be fabricated/constructed with vertically coupled gratings for optical mode matching for a higher percentage of single-mode optical fiber coupling.

The ridge (horizontal) width and ridge depth of 200—the optical waveguide in 140B—the right region are approximately in the range of 0.2 microns to 5 microns and 0.1 microns to 1 micron respectively. Furthermore, both ends of 200—the optical waveguide in 140B—the right region can be tapered out gradually (and antireflection coated at both ends of 200—the optical waveguide in 140B—the right region) for optical mode matching for a higher percentage of single-mode optical fiber coupling.

The distance between 140A—the left region and 140B—the right region is less than 5 microns.

100B—the fast optical switch is a 2×2 fast optical switch with two inputs and two outputs.

In FIG. 4, 180A denotes the first input port of the input wavelength. The input wavelength at 180A—the first input port can exit via 220A—the output exit, when 140A—the left region comprising 120—the vanadium dioxide ultra-thin-film is not optically activated by a light pulse on 120—the vanadium dioxide ultra-thin-film on 140A—the left region.

However, the input wavelength at 180A—the first input port can exit via 220B—the output exit, when 140A—the left region comprising 120—the vanadium dioxide ultra-thin-film is optically activated by a light pulse (e.g., a light pulse from a mode locked semiconductor laser) on 120—the vanadium dioxide ultra-thin-film on 140A—the left region just to induce an insulator-to-metal phase transition on 120—the vanadium dioxide ultra-thin-film.

Similarly, the input wavelength at 180B—the second input port can exit via 200A—the output exit, when 140B—the right region comprising 120—the vanadium dioxide ultra-thin-film is optically activated by a light pulse (e.g., a light pulse from a mode locked semiconductor laser) on 120—the vanadium dioxide ultra-thin-film on 140B—the right region just to induce an insulator-to-metal phase transition on 120—the vanadium dioxide ultra-thin-film.

The insulator-to-metal phase transition with corresponding electrical and optical properties can be with or without any change/deformation in lattice structure of transition.

The intensity (optical power per unit area) of the light pulse is approximately in the range of 0.1 mJ/cm² to 50 mJ/cm². The pulse width of the light pulse is approximately in the range of 0.001 nanoseconds to 0.1 nanoseconds.

Furthermore, a sub-femtosecond near infrared (NIR) laser pulse or a terahertz pulse of suitable field strength can enable the insulator-to-metal transition in 120—the vanadium dioxide ultra-thin-film in about 20-30 picoseconds.

The 120—the vanadium dioxide ultra-thin-film is receiving a light pulse just to induce an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film.

The light pulse can propagate through 460—an optical waveguide and be focused by 480—a lens onto 120—the vanadium dioxide ultra-thin-film.

However, either a focusing up configuration or a focusing down configuration is possible

460—the optical waveguide is fabricated/constructed on 440—a buffer layer, wherein 440—the buffer layer is fabricated/constructed on 420—a suitable substrate (e.g., a silicon-on-insulator substrate).

One pulsed light source is required for 140A—the left region comprising 120—the vanadium dioxide ultra-thin-film and another pulsed light source is required for 140B—the right region; comprising 120—the vanadium dioxide ultra-thin-film.

Generally blue-green wavelength vertical cavity semiconductor laser can be used for the light pulse. Furthermore, 480—a metamaterial-based lens can be utilized for focusing of the light pulse below the diffraction limit.

Other coupler designs (e.g., multimode interference or Mach-Zehnder interferometer) can be realized by a light pulse for just inducing an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film.

In some design applications, the insulator-to-metal phase transition with corresponding electrical and optical properties in 120—the vanadium dioxide ultra-thin-film can be realized by both light pulse and electrical pulse.

In some design applications, the insulator-to-metal phase transition with corresponding electrical and optical properties in 120—the vanadium dioxide ultra-thin-film can be realized by pulses in terahertz frequency of a suitable field strength.

It should be noted that a cluster of vanadium dioxide particles (less than 0.5 microns in diameter) embedded in an ultra-thin-film of polymeric material or in a mesh of metal nanowires can be utilized, instead of 120—the vanadium dioxide ultra-thin-film in fabricating/constructing 100A—the fast optical switch; activated by a light pulse. The polymeric material can be either conducting, semiconducting or non-conducting. Thus, vanadium dioxide particles (less than 0.5 microns in diameter) embedded in an ultra-thin-film of polymeric material or in a mesh of metal nanowires can receive a light pulse just to induce an insulator-to-metal phase transition in the cluster of vanadium dioxide particles (less than 0.5 microns in diameter).

Furthermore, 120—the vanadium dioxide ultra-thin-film can be replaced by a monolayer(s) of a two-dimensional material (e.g., germanene, graphene, phosphorene, silicene and stanene) first, followed by the vanadium dioxide ultra-thin-film last (option 1) or the vanadium dioxide ultra-thin-film first, followed by a monolayer(s) of a two-dimensional material last (option 2) or a monolayer(s) of a two-dimensional material first, followed by the vanadium dioxide ultra-thin-film in the middle, followed by a monolayer(s) of a two-dimensional material last (option 3). Integration of a monolayer(s) of a two-dimensional material can enable faster heat dissipation and/or electronic properties of the entire stacked materials for faster off switching time. The total vertical height/thickness/depth of the vanadium dioxide ultra-thin-film and a monolayer(s) of a two-dimensional material are less than 0.15 microns. It should be noted that the two-dimensional material and/or vanadium dioxide can be in the form a quantum dot(s). It should be noted that vanadium dioxide can also be doped, as described in previous paragraphs.

Metamaterials and/or nanoplasmonic structures endowed with special negative refractive index properties, surrounded by normal materials with positive refractive index properties, as a light (or optical signal(s)) slowing/light (or optical signal(s)) buffering component can slow (even stop) light/optical signal(s) at either input or output of 100B—the fast optical switch (based on 120—the vanadium dioxide, ultra-thin-film activated by a light pulse) for optical processing without any optical-electrical-optical (O-E-O) conversion to read header information of an optical (internet) packet optically. Thus, this can enable an all-optical network. Furthermore, the wavelength or frequency or color of a composite light (or composite optical signal(s)) can slow (even stop) at different spatial points (of metamaterials and/or nanoplasmonic structures endowed with special negative refractive index properties, surrounded by normal materials with positive refractive index properties) to have a trapped effect.

Furthermore, a nanowire of a nonlinear material (e.g., cadmium sulfide) wrapped by a dielectric material, then wrapped by a silver shell at either input or output of 100B—the fast optical switch (based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse) can change the wavelength or frequency or color of light that passes through it. By confining light within the nonlinear material rather than at the interface between the nonlinear material and the silver shell, light intensity can be maximized, while changing the wavelength or frequency or color of light that passes through it.

Additionally, by applying an electric field across a nanosccaled ring of a nonlinear material (e.g., cadmium sulfide), mixing of optical signals at high on or off ratio can be obtained. Such mixing of optical signals at high on or off ratio can act as an optical transistor.

FIG. 5 illustrates an embodiment of 300B—an electronic subsystem to drive 100B—the fast optical switch (based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse).

In FIG. 5, 240 denotes the external controller, 260 denotes the microprocessor/field programmable gate array, and 280B denotes a drive electronics unit/module for 100B—the fast optical switch (based on 120—the vanadium dioxide, ultra-thin-film activated by a light pulse).

300B—the electronic subsystem integrates 240, 260 and 280B. 300B—the electronic subsystem to drive 100B—the fast optical switch (based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse).

240—the external controller can communicate serially with 260—the microprocessor/field programmable gate array.

FIG. 6 illustrates an embodiment of 400B—a fast optical switch processor B, comprising 100B—the fast optical switch in a matrix configuration (wherein 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse).

In FIG. 6, 400B denotes a fast optical switch processor B; 200 denotes the optical waveguide; 320 denotes the input single-mode optical fiber array; 300B denotes the electronic subsystem to drive 100B—the fast optical switch (based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse); 340 denotes the thermoelectric cooler to maintain 400B—the optical switch processor B at a specified temperature; 360 denotes the heat sink, and 380 denotes the output single-mode optical fiber array.

Thus, 400B—the fast optical switch processor B can switch a wavelength from any input fiber to any output fiber in less than 10 nanoseconds.

FIG. 7 illustrates 660A—an on-demand optical add-drop subsystem integrated with 100A—the fast optical switch (wherein 100A—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse).

In FIG. 7, all input wavelengths from 320—an input optical fiber can be transmitted via 200A—an optical waveguide and amplified by 500—an erbium doped waveguide amplifier (EDWA) integrated with a 980-nm pump laser, tapped by 520—a tap coupler to measure wavelengths by 540—a spectrophotometer. A few wavelengths can proceed to 560A/560B/560C—a first wavelength demultiplexer 1 and then exit to the drop ports. Other express wavelengths can proceed to 560A/560B/560C—a second wavelength demultiplexer 2 for demultiplexing then as selective inputs to 100A—the fast optical switch.

It should be noted that a semiconductor optical amplifier can be utilized instead of 500—the erbium doped waveguide amplifier integrated with a 980-nm pump laser 500.

It should be noted that arrayed waveguide gratings (AWG) based wavelength multiplexers/demultiplexers can also be utilized.

560A denotes a fixed (wavelength) demultiplexer, 560B denotes a (wavelength) tunable demultiplexer and 560C denotes a (wavelength) tunable one-dimensional photonic crystal-based demultiplexer.

An array of rapidly wavelength tunable lasers can provide a set of new wavelengths to add ports. The output (wavelengths) of 560A/560B/560C—the second wavelength demultiplexer 2 and these newly added wavelengths can be switched by an array of 100As—the fast optical switches.

Switched wavelengths from 100As—the fast optical switches can be modulated by 580 s-optical modulators (e.g., silicon traveling-waveguide/graphene-on-silicon optical modulators). 580—the optical modulator can include a (wafer bonded) nanoscaled modulator of lithium niobate.

The optical power output of 580—the optical modulator can be controlled by 500—the erbium doped waveguide amplifier integrated with a 980-nm pump laser, 600—a variable optical attenuator (VOA) (e.g., a PLZT-based variable optical attenuator) and 620—a photodiode.

The modulated wavelengths (or modulated optical signals) can be independently controlled at a specified optical power and then multiplexed by 640A/640B/640C—a multiplexer. Thus, independent control of each wavelength can enable an approximately flat optical power curve for all output wavelengths at 380—an output optical fiber.

640A denotes a fixed (wavelength) multiplexer, 640B denotes a (wavelength) tunable multiplexer and 640C denotes a (wavelength) tunable one-dimensional photonic crystal-based multiplexer.

A wavelength tunable multiplexer/demultiplexer includes a control circuit and one or more controls such as heaters thermally coupled and/or refractive index changing electrical paths electrically coupled to waveguides of the multiplexer/demultiplexer.

The control circuit is in signal communication with one or more controls and also includes a microprocessor/field programmable gate array coupled with an electronic memory component. The control circuit receives an identification signal and adjusts the control in response to the identification signal and based on parameter values stored in the electronic memory component.

Alternatively, a voltage tunable multiplexer/demultiplexer can be realized when the material composition of the multiplexer/demultiplexer is a crystalline semiconductor (e.g., indium phosphide) rather than silica. Furthermore, the transmission characteristics of the tunable multiplexer/demultiplexer can be varied depending on external control input(s).

FIG. 8 illustrates an embodiment of 300C—an electronic subsystem to drive 660A—the on-demand optical add-drop subsystem, integrated with 100A—the fast optical switch (wherein 100A—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse).

In FIG. 8, 240 denotes the external controller, 260 denotes the microprocessor/field programmable gate array and 280C denotes a drive electronics unit/module for 660A—the on-demand optical add-drop subsystem, integrated with 100A—the fast optical switch (wherein 100A—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse).

300C—the electronic subsystem integrates 240, 260 and 280C. 300C—the electronic subsystem to drive 660A.

240—the external controller can communicate serially with 260—the microprocessor/field programmable gate array.

FIG. 9 illustrates an embodiment of 680A—an optical network processor system, comprising 660A—the on-demand optical add-drop subsystem in a matrix configuration, wherein 660A—the on-demand optical add-drop subsystem comprises 100A—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse just to induce an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film.

In FIG. 9, 680A denotes an optical network processor system A; 200A denotes the optical waveguide; 320 denotes the input single-mode optical fiber array; 300C denotes the electronic subsystem to drive 660A—the on-demand optical add-drop subsystem; 340 denotes the thermoelectric cooler to maintain 680A—the optical network processor system A at a specified temperature; 360 denotes the heat sink and 380 denotes the output single-mode optical fiber array.

Thus, 680A—the optical network processor system A, demultiplex, multiplex can switch a wavelength from any input fiber to any output fiber.

FIG. 10 illustrates 660B—an on-demand optical add-drop subsystem, integrated with 100B—the fast optical switch (wherein 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse).

In FIG. 10, all input wavelengths from 320—the input optical fiber can be transmitted via 200A—an optical waveguide and amplified by 500—the erbium doped waveguide amplifier integrated with a 980-nm pump laser, tapped by 520—the tap coupler to measure wavelengths by 540—the spectrophotometer. A few wavelengths can proceed to 560A/560B/560C—the first wavelength demultiplexer 1 and then exit to the drop ports. Other express wavelengths can proceed to 560A/560B/560C—the second wavelength demultiplexer 2 for demultiplexing, then as selective inputs to 100B—the fast optical switch.

An array of rapidly wavelength tunable lasers can provide a set of new wavelengths to the add ports. The output (wavelengths) of 560A/560B/560C—the second wavelength demultiplexer 2 and these newly added wavelengths can be switched by an array of 100Bs—the fast optical switches.

Switched wavelengths from 100Bs—the fast optical switches can be modulated by an array of 580 s—the optical modulators.

The optical power output of 580—the optical modulator can be controlled by 500—the erbium doped waveguide amplifier integrated with a 980-nm pump laser, 600—the variable optical attenuator and 620—the photodiode.

The modulated wavelengths (or modulated optical signals) can be independently controlled at a specified optical power and then multiplexed by 640A/640B/640C—the multiplexer. Thus, independent control of each wavelength can enable an approximately flat optical power curve for all output wavelengths at 380—the output optical fiber.

FIG. 11 illustrates an embodiment of 300D—an electronic subsystem to drive 660B—the on-demand optical add-drop subsystem, integrated with 100B—the fast optical switch (wherein 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse).

In FIG. 11, 240 denotes the external controller, 260 denotes the microprocessor/field programmable gate array and 280D denotes a drive electronics unit/module for 660B—the on-demand optical add-drop subsystem, integrated with 100B—the fast optical switch (wherein 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse).

300D—the electronic subsystem integrates 240, 260 and 280D. 300D—the electronic subsystem is to drive 660B.

240—the external controller can communicate serially with 260—the microprocessor/field programmable gate array.

FIG. 12 illustrates an embodiment of 680B—an optical network processor system B, comprising 660B—the on-demand optical add-drop subsystem in a matrix configuration, wherein 660B—the on-demand optical add-drop subsystem comprises 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse just to induce an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film.

In FIG. 12, 680B denotes the optical network processor system B; 200A denotes the optical waveguide; 320 denotes the input single-mode optical fiber array; 300D denotes the electronic subsystem to drive 660B—the on-demand optical add-drop subsystem; 340 denotes the thermoelectric cooler to maintain; 680B—the optical network processor system B at a specified temperature; 360 denotes the heat sink and 380 denotes the output single-mode optical fiber array.

Thus, 680B—the optical network processor system B, demultiplex, multiplex can switch a wavelength from any input fiber to any output fiber.

FIG. 13A illustrates 820A—an embodiment of a wavelength converter, wherein 760—a coupler connects to 700—an input optical signal and 720—a pump laser via 740—a coupler waveguide. 760—the coupler is optically coupled with 780A—As₂S₃ chalcogenide, a four-wave mixing non-linear material. The output of 780A—As₂S₃ chalcogenide, a four-wave mixing non-linear material, can be optically coupled with 800—a specific filter block. The output of 800—the filter block is the converted wavelength.

FIG. 13B illustrates 820B—an embodiment of a wavelength converter, wherein 760—a coupler connects to 700—an input optical signal and 720—a pump laser via 740—a coupler waveguide. 760—the coupler is optically coupled with 780B—two-dimensional photonic crystal-based As₂S₃ chalcogenide, a four-wave mixing non-linear material. The output of 780B—two-dimensional photonic crystal-based As₂S₃ chalcogenide, a four-wave mixing non-linear material, can be optically coupled with 800—the specific filter block. The output of 800—the filter block is the converted wavelength.

FIG. 13C illustrates 820C—an embodiment of a wavelength converter, wherein 760—a coupler connects to 700—an input optical signal and 720—a pump laser via 740—a coupler waveguide. 760—the coupler is optically coupled with 780C—graphene on two-dimensional photonic crystal silicon optical waveguide, a four-wave mixing non-linear material. The output of 780C—graphene on two-dimensional photonic crystal silicon optical waveguide, a four-wave mixing non-linear material, can be optically coupled with 800—the specific filter block. The output of 800—the filter block is the converted wavelength.

Alternatively, a wavelength converter can be fabricated/constructed utilizing a semiconductor optical amplifier or a quantum dot-based semiconductor optical amplifier (QD-SOA).

FIG. 14 illustrates 840A—an on-demand optical add-drop subsystem, integrated with 100A—the fast optical switch (wherein 100A—the fast optical switch is based on 120 the vanadium dioxide ultra-thin-film activated by an electrical pulse) and 820A/B/C—the wavelength converter.

In FIG. 14, all input wavelengths from 320—the input optical fiber can be transmitted via 200A—an optical waveguide and amplified by 500—the erbium doped waveguide amplifier integrated with a 980-nm pump laser, tapped by 520—the tap coupler to measure wavelengths by 540—the spectrophotometer. A few wavelengths can proceed to 560A/560B/560C—the first wavelength demultiplexer 1 and then exit-to the drop ports. Other express wavelengths can proceed to 560A/560B/560C—the second wavelength demultiplexer 2 for demultiplexing, then as selective inputs to 100A—the fast optical switch.

An array of rapidly wavelength tunable lasers can provide a set of new wavelengths to the add ports. The output (wavelengths) of 560A/560B/560C—the second wavelength demultiplexer 2 can converted in wavelength by an array of 820A/B/Cs—the wavelength converters. Thus, the converted wavelengths from the array 820A/B/Cs—the wavelength converters and these newly added wavelengths can be switched by an array of 100As—the fast optical switches.

Switched wavelengths from 100As—the fast optical switches can be modulated by an array of 580 s—the optical modulators. 580—the optical modulator can include a (wafer bonded) nanoscaled modulator of lithium niobate.

The optical power output of 580—the optical modulator can be controlled by 500—the erbium doped waveguide amplifier integrated with a 980-nm pump laser, 600—the variable optical attenuator and 620—the photodiode.

The modulated wavelengths (or modulated optical signals) can be independently controlled at a specified optical power and then multiplexed by 640A/640B/640C—the multiplexer. Thus, independent control of each wavelength can enable approximately flat optical power curve for all output wavelengths at 380—the output optical fiber.

FIG. 15 illustrates an embodiment of 300E—an electronic subsystem to drive 840A—the on-demand optical add-drop subsystem, integrated with 100A—the fast optical switch (wherein 100A—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse) and 820A/B/C—the wavelength converter.

In FIG. 15, 240 denotes the external controller, 260 denotes the microprocessor/field programmable gate array and 280E denotes a drive electronics unit/module for 840A—the on-demand optical add-drop subsystem, integrated with 100A—the fast optical switch (wherein 100A—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse) and 820A/B/C—the wavelength converter.

300E—the electronic subsystem integrates 240, 260 and 280E. 300E—the electronic subsystem to drive 840A.

240—the external controller can communicate serially with 260—the microprocessor/field programmable gate array.

FIG. 16 illustrates an embodiment of 860A—an advanced optical network processor system C in a matrix configuration, wherein 860A—the advanced optical network processor system C comprising—840A—the on-demand optical add-drop subsystem, wherein 840A—the on-demand optical add-drop subsystem comprises (a) 100A—the fast optical switch based on 120—the vanadium dioxide ultra-thin-film activated by an electrical pulse just to induce an insulator-to-metal phase transition in 120—the vanadium dioxide ultra-thin-film and (b) 820A/B/C—the wavelength converter.

In FIG. 16, 860A denotes the advanced optical network processor system C; 200A denotes the optical waveguide; 320 denotes the input single-mode optical fiber array; 300E denotes the electronic subsystem to drive 840A—the advanced optical network processor system C; 340 denotes the thermoelectric cooler to maintain 860A—the advanced optical network processor system C at a specified temperature; 360 denotes the heat sink and 380 denotes the output single-mode optical fiber array.

Thus, 860A—the advanced optical network processor system C can demultiplex, multiplex, convert and switch a wavelength from any input fiber to any output fiber.

FIG. 17 illustrates 840B—an on-demand optical add-drop subsystem, integrated with 100B—the fast optical switch (wherein 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse) and 820A/B/C—the wavelength converter.

In FIG. 17, all input wavelengths from 320—the input optical fiber can be transmitted via 200A—an optical waveguide and amplified by 500—the erbium doped waveguide amplifier integrated with a 980-nm pump laser, tapped by 520—the tap coupler to measure wavelengths by 540—the spectrophotometer. A few wavelengths can proceed to 560A/560B/560C—the first wavelength demultiplexer 1 and then exit to the drop ports. Other express wavelengths can proceed to 560A/560B/560C—the second wavelength demultiplexer 2 for demultiplexing, then as selective inputs to 100B—the fast optical switch.

An array of rapidly wavelength tunable lasers can provide a set of new wavelengths to the add ports. The output (wavelengths) of 560A/560B/560C—the second wavelength demultiplexer 2 can be converted in wavelength by an array of 820A/B/Cs—the wavelength converters. Thus, the converted wavelengths from the array 820A/B/Cs—the wavelength converters and these newly added wavelengths can be switched by an array of 100Bs—the fast optical switches.

Switched wavelengths from 100Bs—the fast optical switches can be modulated by an array of 580 s—the optical modulators. 580—the optical modulator can include a (wafer bonded) nanoscaled modulator of lithium niobate.

The optical power output of 580—the optical modulator can be controlled by 500—the erbium doped waveguide amplifier integrated with a 980-nm pump laser, 600—the variable optical attenuator and 620—the photodiode.

The modulated wavelengths (or modulated optical signals) can be independently controlled at a specified optical power and then multiplexed by 640A/640B/640C—the multiplexer. Thus, independent control of each wavelength can enable an approximately flat optical power curve for all output the wavelengths at 380—the output optical fiber.

FIG. 18 illustrates an embodiment of 300F—an electronic subsystem to drive 840B—the on-demand optical add-drop subsystem, integrated with 100B—the fast optical switch (wherein 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse) and 820A/B/C—the wavelength converter.

In FIG. 18, 240 denotes the external controller, 260 denotes the microprocessor/field programmable gate array and 280F denotes a drive electronics unit/module for 840B—the on-demand optical add-drop subsystem, integrated with 100B—the fast optical switch (wherein 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse) and 820A/B/C—the wavelength converter.

300F—the electronic subsystem integrates 240, 260 and 280F. 300F—the electronic subsystem is to drive 840B.

240—the external controller can communicate serially with 260—the microprocessor/field programmable gate array.

FIG. 19 illustrates an embodiment of 860B—an advanced optical network processor system D in a matrix configuration, wherein 860B—the advanced optical network processor system D comprising-840B—the on-demand optical add-drop subsystem, wherein 840B—the on-demand optical add-drop subsystem comprises (a) 100B—the fast optical switch is based on 120—the vanadium dioxide ultra-thin-film activated by a light pulse just to induce an insulator-to-metal transition in 120—the vanadium dioxide ultra-thin-film, and (b) 820A/B/C—the wavelength converter.

In FIG. 19, 860B denotes the advanced optical network processor system D; 200A denotes the optical waveguide; 320 denotes the input single-mode optical fiber array; 300F denotes the electronic subsystem to drive 840B—the advanced optical network processor system D; 340 denotes the thermoelectric cooler to maintain 860B—the advanced optical network processor system D at a specified temperature; 360 denotes the heat sink and 380 denotes the output single-mode optical fiber array.

Thus, 860B—the advanced optical network processor system D can demultiplex, multiplex, convert and switch a wavelength from any input fiber to any output fiber.

100A/100B can be integrated with a semiconductor laser/widely tunable semiconductor laser/widely tunable fast switching semiconductor laser at 180A—the input optical waveguide and/or at 180B—the input optical waveguide for higher functionality. Such integration can include coupling from an optical waveguide to another optical waveguide via a collimating lens, wherein the collimating lens can be suitably positioned by a microelectro-mechanical system (MEMS)/nanoelectro-mechanical system (NEMS) based actuator.

100A/100B can be integrated with an array of semiconductor lasers/widely tunable semiconductor lasers/widely tunable fast switching semiconductor lasers at 180A—the input optical waveguide and/or at 180B—the input optical waveguide for higher functionality. Such integration can include coupling of the array of semiconductor lasers/widely tunable semiconductor lasers/widely tunable fast switching semiconductor lasers to 180A—the input optical waveguide and/or at 180B—the input optical waveguide via a microelectromechanical system/nanoelectromechanical system-based tilt mirror.

400A, 400B, 680A, 680B, 860A and 860B can be integrated with microring resonator filters and/or wavelength tunable optical dispersion compensators.

Furthermore, 400A, 400B, 680A, 680B, 860A and 860B can be integrated with biplexer filters and/or triplexer filters.

400A or 400B can be integrated with a log₂ N demultiplexer for optical packet switched optical networks, where the switching delay is critical for high performance. A log₂ N demultiplexer can consist of rectangular-shaped periodic frequency filters connected in series, wherein the rectangular-shaped periodic frequency filters can be formed in a one-dimensional photonic crystal structure on a ridge optical waveguide.

Flip-chip bonding was developed as an alternative to wire bonding. In flip-chip bonding, components are flipped upside-down and placed on an array of solder bumps that form the connection between a device and circuit. 400A, 400B, 680A, 680B, 860A and 860B can be packaged utilizing flip-chip bonding onto a precise silicon-on-insulator substrate.

Single-mode optical fibers can be aligned passively with precise metal alignment pins seated into v-grooves on the precise substrate. The precise metal alignment pins can be utilized top mate with a pluggable optical fiber connector integrated with a molded plastic lens. Alternatively, an array of multi-mode optical fibers can be used instead of an array of single-mode optical fibers for short distance (e.g., LAN) applications.

In general, but not limited to the optical switch of a phase transition material can be: (a) An optical switch including a first optical waveguide and a second optical waveguide, wherein the first optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron,

wherein the second optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the horizontal width of the first optical waveguide can be same or different with respect to the second optical waveguide, wherein the vertical height/thickness/depth of the first optical waveguide can be same or different with respect to the second optical waveguide, wherein a section of the first optical waveguide is substantially parallel within manufacturing tolerance to a section of the second optical waveguide, wherein the section of the first optical waveguide is optically coupled with an ultra thin-film of vertical height/thickness/depth less than 0.5 microns, typically 50 nanometers to 300 nanometers, wherein the ultra thin-film includes a phase transition material, wherein the phase transition material on the first optical waveguide is receiving a first stimulant, just to induce insulator-to-metal (IMT) phase transition in the phase transition material on the first optical waveguide, wherein the said insulator-to-metal (IMT) phase transition is with a change in lattice structure or without a change in lattice structure, and/or wherein the section of the second optical waveguide is optically coupled with an ultra thin-film of vertical height/thickness/depth less than 0.5 microns, typically 50 nanometers to 300 nanometers, wherein the ultra thin-film includes the phase transition material, wherein the phase transition material on the second optical waveguide is receiving a second stimulant, just to induce insulator-to-metal (IMT) phase transition in the phase transition material on the second optical waveguide, wherein the said insulator-to-metal (IMT) phase transition is with a change in lattice structure or without a change in lattice structure.

The first stimulant is just one of the following: a first electrical pulse or a first light pulse or a first pulse in terahertz (THz) frequency of a suitable field strength or first hot electrons,

or the first stimulant is the combination of one or more of the following: a first electrical pulse, a first light pulse, a first pulse in terahertz (THz) frequency of a suitable field strength and first hot electrons, wherein the first electrical pulse is a voltage pulse or a current pulse.

Similarly,

The second stimulant is just one of the following: a second electrical pulse or a second light pulse or a second pulse in terahertz (THz) frequency of a suitable field strength or second hot electrons, or the second stimulant is the combination of one or more of the following: a second electrical pulse, a second light pulse, a second pulse in terahertz (THz) frequency of a suitable field strength and second hot electrons, wherein the second electrical pulse is a voltage pulse or a current pulse. (b) Alternatively, an optical switch of a phase transition material including a first optical waveguide, a second optical waveguide and a third waveguide, wherein the first optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the second optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the third optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the horizontal width of the first optical waveguide can be same or different with respect to the horizontal width of the second optical waveguide, wherein the horizontal width of the second optical waveguide can be same or different with respect to the horizontal width of the third optical waveguide, wherein the vertical height/thickness/depth of the first optical waveguide can be same or different with respect to the second optical waveguide, wherein the vertical height/thickness/depth of the second optical waveguide can be same or different with respect to the third optical waveguide, wherein a section of the first optical waveguide is substantially parallel within manufacturing tolerance to a section of the second optical waveguide, wherein a section of the second optical waveguide is substantially parallel within manufacturing tolerance to a section of the third optical waveguide, wherein the section of the second optical waveguide is optically coupled with an ultra thin-film of vertical height/thickness/depth less than 0.5 microns, typically 50 nanometers to 300 nanometers, wherein the ultra thin-film on the second optical waveguide includes a phase transition material, wherein the phase transition material on the second optical waveguide is receiving a stimulant, just to induce insulator-to-metal (IMT) phase transition in the phase transition material on the second optical waveguide, wherein the said insulator-to-metal (IMT) phase transition is with a change in lattice structure or without a change in lattice structure. The stimulant is just one of the following: an electrical pulse or a light pulse or a pulse in terahertz (THz) frequency of a suitable field strength or hot electrons, or the stimulant is the combination of one or more of the following: a electrical pulse, a light pulse, a pulse in terahertz (THz) frequency of a suitable field strength and hot electrons, wherein the electrical pulse is a voltage pulse or a current pulse.

The optical switch as in above, wherein the first optical waveguide and/or the second optical waveguide and/or the third optical waveguide is coupled with a one-dimensional photonic crystal.

The optical switch as in above, wherein the first optical waveguide and/or the second optical waveguide and/or the third optical waveguide is coupled with a two-dimensional photonic crystal.

The optical switch as in above, wherein the phase transition material is segmented, wherein each segment has a separate electrical bias electrode.

The optical switch as in above, wherein the phase transition material is stoichiometric undoped vanadium dioxide or doped vanadium dioxide.

The optical switch as in above, wherein just the phase transition material is fabricated on a (low optical loss) waveguide material of insulator/semiconductor (e.g. diamond or silicon).

The optical switch as in above, wherein the phase transition material is a Mott insulator.

The optical switch as in above, includes gratings of phase transition materials.

The optical switch as in above, further including directionally coupled optical waveguides or a multimode interference coupler (or a Mach-Zehnder interferometer only in the case of the first optical waveguide and second optical waveguide).

The optical switch as in above, further including coupling with a wavelength multiplexer or a wavelength demultiplexer.

The optical switch as in above, further including coupling with a wavelength tunable multiplexer or a wavelength tunable demultiplexer.

The optical switch as in above, further including coupling with a wavelength tunable photonic crystal multiplexer or a wavelength tunable photonic crystal demultiplexer.

The optical switch as in above, further including coupling with an optical add-drop subsystem or an optical filter.

The optical switch as in above, further including coupling with a ring resonator or a laser.

The optical switch as in above, further including coupling with a wavelength converter, wherein the wavelength converter includes As₂S₃ chalcogenide material or two-dimensional photonic crystal As₂S₃ chalcogenide material or graphene on two-dimensional photonic crystal silicon optical waveguide. The optical switch, further including the wavelength converter, wherein the wavelength converter also includes a semiconductor optical amplifier or a quantum dot based semiconductor optical amplifier.

The optical switch according as in above, further including coupling with a semiconductor optical amplifier or a quantum dot based semiconductor optical amplifier or an erbium doped waveguide amplifier.

The optical switch as in above, further including coupling with a nanoscaled modulator of lithium niobate.

The optical switch as in above, further including coupling with a light slowing component or a light stopping component, wherein the light slowing component or the light stopping component includes metamaterials of negative refractive index or nanostructures.

The optical switch as in above, includes gradually tapered waveguide for waveguide to optical fiber coupling.

The optical switch as in above, includes vertically coupled gratings for waveguide to optical fiber coupling.

The optical switch as in above is flip-chip mounted on a nanoscaled fin array and/or a heat dissipating substrate, wherein the nanoscaled fin array includes an array of nanoscaled metal pillars embedded in a thermally conducting thin-film.

The optical switch as in above, is temperature controlled by a thermoelectric cooler.

In general, but not limited to the optical switch of a phase change material can be:

(a) An optical switch including a first optical waveguide and a second optical waveguide, wherein the first optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the second optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the horizontal width of the first optical waveguide can be same or different with respect to the horizontal width of the second optical waveguide, wherein the vertical height/thickness/depth of the first optical waveguide can be same or different with respect to the vertical height/thickness/depth second optical waveguide, wherein a section of the first optical waveguide is substantially parallel within manufacturing tolerance to a section of the second optical waveguide, wherein the section of the first optical waveguide is optically coupled with an ultra thin-film of vertical height/thickness/depth less than 0.5 microns, less than 0.5 microns, typically 50 nanometers to 400 nanometers, wherein the ultra thin-film includes a phase change material, wherein the phase change material on the first optical waveguide is receiving a first stimulant, just to induce phase change in the phase change material on the first optical waveguide, and/or, wherein the section of the second optical waveguide is optically coupled with an ultra thin-film of vertical height/thickness/depth less than 0.5 microns, typically 50 nanometers to 400 nanometers, wherein the ultra thin-film comprises: the phase change material, wherein the phase change material on the second optical waveguide is receiving a second stimulant, just to induce phase change in the phase change material on the second optical waveguide. The first stimulant is just one of the following: a first electrical pulse or a first light pulse or a first pulse in terahertz (THz) frequency of a suitable field strength, or the first stimulant is the combination of one or more of the following: a first electrical pulse, a first light pulse and a first pulse in terahertz (THz) frequency of a suitable field strength, wherein the first electrical pulse is a voltage pulse or a current pulse.

Similarly,

The second stimulant is just one of the following: a second electrical pulse or a second light pulse or a second pulse in terahertz (THz) frequency of a suitable field strength, or the second stimulant is the combination of one or more of the following: a second electrical pulse, a second light pulse and a second pulse in terahertz (THz) frequency of a suitable field strength, wherein the second electrical pulse is a voltage pulse or a current pulse. (b) Alternatively, an optical switch of a phase change material including a first optical waveguide, a second optical waveguide and a third waveguide, wherein the first optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the second optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the third optical waveguide is less than 5 microns in horizontal width, typically 200 nanometers to 1 micron, wherein the horizontal width of the first optical waveguide can be same or different with respect to the horizontal width of the second optical waveguide, wherein the horizontal width of the second optical waveguide can be same or different with respect to the horizontal width of the third optical waveguide, wherein the vertical height/thickness/depth of the first optical waveguide can be same or different with respect to the second optical waveguide, wherein the vertical height/thickness/depth of the second optical waveguide can be same or different with respect to the third optical waveguide, wherein a section of the first optical waveguide is substantially parallel within manufacturing tolerance to a section of the second optical waveguide, wherein a section of the second optical waveguide is substantially parallel within manufacturing tolerance to a section of the third optical waveguide, wherein the section of the second optical waveguide is optically coupled with an ultra thin-film of vertical height/thickness/depth less than 0.5 microns, typically 50 nanometers to 400 nanometers, wherein the ultra thin-film on the second optical waveguide includes a phase change material, wherein the phase transition material on the second optical waveguide is receiving a stimulant, just to induce phase change in the phase change material on the second optical waveguide, The stimulant is just one of the following: an electrical pulse or a light pulse or a pulse in terahertz (THz) frequency of a suitable field strength, or the stimulant is the combination of one or more of the following: a electrical pulse, a light pulse and a pulse in terahertz (THz) frequency of a suitable field strength, wherein the electrical pulse is a voltage pulse or a current pulse.

The optical switch as in above, wherein the first optical waveguide and/or the second optical waveguide and/or the third optical waveguide is coupled with a one-dimensional photonic crystal.

The optical switch as in above, wherein the first optical waveguide and/or the second optical waveguide and/or the third optical waveguide is coupled with a two-dimensional photonic crystal.

The optical switch as in above, wherein the phase change material is segmented, wherein each segment has a separate electrical bias electrode.

The optical switch as in above, includes gratings of phase change materials.

The optical switch as in above, wherein the phase transition material includes gratings.

The optical switch as in above, further including directionally coupled optical waveguides or a multimode interference coupler (or a Mach-Zehnder interferometer only in the case of the first optical waveguide and second optical waveguide).

The optical switch as in above, further including coupling with a wavelength multiplexer or a wavelength demultiplexer.

The optical switch as in above, further including coupling with a wavelength tunable multiplexer or a wavelength tunable demultiplexer.

The optical switch as in above, further including coupling with a wavelength tunable photonic crystal multiplexer or a wavelength tunable photonic crystal demultiplexer.

The optical switch as in above, further including coupling with an optical add-drop subsystem or an optical filter.

The optical switch as in above, further including coupling with a ring resonator or a laser.

The optical switch as in above, further including coupling with a wavelength converter, wherein the wavelength converter includes As₂S₃ chalcogenide material or two-dimensional photonic crystal As₂S₃ chalcogenide material or graphene on two-dimensional photonic crystal silicon optical waveguide. The optical switch, further including the wavelength converter, wherein the wavelength converter also includes a semiconductor optical amplifier or a quantum dot based semiconductor optical amplifier.

The optical switch according as in above, further including coupling with a semiconductor optical amplifier or a quantum dot based semiconductor optical amplifier or an erbium doped waveguide amplifier.

The optical switch as in above, further including coupling with a nanoscaled modulator of lithium niobate.

The optical switch as in above, further including coupling with a light slowing component or a light stopping component, wherein the light slowing component or the light stopping component includes metamaterials of negative refractive index or nanostructures.

The optical switch as in above, includes gradually tapered waveguide for waveguide to optical fiber coupling.

The optical switch as in above, includes vertically coupled gratings for waveguide to optical fiber coupling.

The optical switch as in above is flip-chip mounted on a nanoscaled fin array and/or a heat dissipating substrate, wherein the nanoscaled fin array includes an array of nanoscaled metal pillars embedded in a thermally conducting thin-film.

The optical switch as in above is temperature controlled by a thermoelectric cooler.

It should be noted that the optical switch including a phase transition material can be faster than the optical switch including a phase change material. However, a phase change material may enable lower optical loss.

PREFERRED EMBODIMENTS & SCOPE OF THE INVENTION

In the above disclosed specifications “/” has been used to indicate an “or” and real-time means near real-time in practice.

In the above disclosed specifications “waveguide” has been used to indicate an “optical waveguide”

As used in this patent application and in the claims, the singular forms “a”, “an”, and “the” include also the plural forms, unless the context clearly dictates otherwise.

The term “includes” means “comprises”. The term “including” means “comprising”.

The term “couples” or “coupled” does not exclude the presence of an intermediate element(s) between the coupled items.

Any example in the above disclosed specifications is by way of an example only and not by way of any limitation. Having described and illustrated the principles of the disclosed technology with reference to the illustrated embodiments, it will be recognized that the illustrated embodiments can be modified in any arrangement and detail with departing from such principles. The technologies from any example can be combined in any arrangement with the technologies described in any one or more of the other examples. Alternatives specifically addressed in this patent application are merely exemplary and do not constitute all possible examples. Claimed invention is disclosed as one of several possibilities or as useful separately or in various combinations. See Novozymes A/S v. DuPont Nutrition Biosciences APS, 723 F3d 1336,1347.

The best mode requirement “requires an inventor(s) to disclose the best mode contemplated by him/her, as of the time he/she executes the patent application, of carrying out the invention.” “ . . . [T]he existence of a best mode is a purely subjective matter depending upon what the inventor(s) actually believed at the time the (patent) application was filed.” See Bayer AG v. Schein Pharmaceuticals, Inc. The best mode requirement still exists under the America Invents Act (AIA). At the time of the invention, the inventor(s) described preferred best mode embodiments of the present invention. The sole purpose of the best mode requirement is to restrain the inventor(s) from applying for a patent, while at the same time concealing from the public preferred embodiments of their inventions, which they have in fact conceived. The best mode inquiry focuses on the inventor(s)' state of mind at the time he/she filed the patent application, raising a subjective factual question. The specificity of disclosure required to comply with the best mode requirement must be determined by the knowledge of facts within the possession of the inventor(s) at the time of filing the patent application. See Glaxo, Inc. v. Novopharm Ltd., 52 F,3d 1043, 1050 (Fed. Cir. 1995).

The above disclosed specifications are the preferred best mode embodiments of the present invention. However, they are not intended to be limited only to the preferred best mode embodiments of the present invention. Numerous variations and/or modifications are possible within the scope of the present invention. Accordingly, the disclosed preferred best mode embodiments are to be construed as illustrative only. Those who are skilled in the art can make various variations and/or modifications without departing from the scope and spirit of this invention. It should be apparent that features of one embodiment can be combined with one or more features of another embodiment to form a plurality of embodiments. The inventor(s) of the present invention is not required to describe each and every conceivable and possible future embodiment in the preferred best mode embodiments of the present invention. See SRI Int'l v. Matsushita Elec. Corp. of America, 775F.2d 1107, 1121, 227 U.S.P.Q. (BNA) 577, 585 (Fed. Cir. 1985) (enbanc).

The scope and spirit of this invention shall be defined by the claims and the equivalents of the claims only. The exclusive use of all variations and/or modifications within the scope of the claims is reserved. The general presumption is that claim terms should be interpreted using their plain and ordinary meaning. See Oxford Immunotec Ltd. v. Qiagen, Inc. et al., Action No. 15-cv-13124-NMG. Unless a claim term is specifically defined in the preferred best mode embodiments, then a claim term has an ordinary meaning, as understood by a person with an ordinary skill in the art, at the time of the present invention. Plain claim language will not be narrowed, unless the inventor(s) of the present invention clearly and explicitly disclaims broader claim scope. See Sumitomo Dainippon Pharma Co. v. Emcure Pharm. Ltd., Case Nos. 17-1798; -1799; -1800 (Fed. Cir. Apr. 16, 2018) (Stoll, J). As noted long ago: “Specifications teach. Claims claim”. See Rexnord Corp. v. Laitram Corp., 274 F.3d 1336, 1344 (Fed. Cir. 2001). The rights of claims (and rights of the equivalents of the claims) under the Doctrine of Equivalents-meeting the “Triple Identity Test” (a) performing substantially the same function, (b) in substantially the same way and (c) yielding substantially the same result. See Crown Packaging Tech., Inc. v. Rexam Beverage Can Co., 559 F.3d 1308, 1312 (Fed. Cir. 2009)) of the present invention are not narrowed or limited by the selective imports of the specifications (of the preferred embodiments of the present invention) into the claims.

While “absolute precision is unattainable” in patented claims, the definiteness requirement “mandates clarity.” See Nautilus, Inc. v. Biosig Instruments, Inc., 527 U.S. ______, 134 S. Ct. 2120, 2129, 110 USPQ2d 1688, 1693 (2014). Definiteness of claim language must be analyzed NOT in a vacuum, but in light of:

-   -   (a) The content of the particular patent application disclosure,     -   (b) The teachings of any prior art, and     -   (c) The claim interpretation that would be given by one         possessing the ordinary level of skill in the pertinent art at         the time the invention was made. (Id.).         See Orthokinetics, Inc. v. Safety Travel Chairs, Inc., 806 F.2d         1565, 1 USPQ2d 1081 (Fed. Cir. 1986)

There are number of ways the written description requirement is satisfied.

Applicant(s) does not need to describe every claim element exactly, because there is no such requirement (MPEP § 2163). Rather to satisfy the written description requirement, all that is required is “reasonable clarity” (MPEP § 2163.02). An adequate description may be made in anyway through express, implicit or even inherent disclosures in the patent application, including word, structures, figures, diagrams and/or equations (MPEP §§ 2163(1), 2163.02). The set of claims in this invention generally covers a set of sufficient number of embodiments to conform to written description and enablement doctrine. See Ariad Pharm., Inc. v. Eli Lilly & Co., 598 F.3d 1336, 1355 (Fed. Cir. 2010), Regents of the University of California v. Eli Lilly & Co., 119 F.3d 1559 (Fed. Cir. 1997) & Amgen Inc. v. Chugai Pharmaceutical Co. 927 F.2d 1200 (Fed. Cir. 1991).

Furthermore, Amgen Inc. v. Chugai Pharmaceutical Co. exemplifies Federal Circuit's strict enablement requirements. Additionally, the set of claims in this invention is intended to inform the scope of this invention with “reasonable certainty”. See Interval Licensing, LLC v. AOL Inc. (Fed. Cir. Sep. 10, 2014). A key aspect of the enablement requirement is that it only requires that others will not have to perform “undue experimentation” to reproduce it. Enablement is not precluded by the necessity of some experimentation, “[t]he key word is ‘undue’, not experimentation.” Enablement is generally considered to be the most important factor for determining the scope of claim protection allowed. The scope of enablement must be commensurate with the scope of the claims. However, enablement does not require that an inventor disclose every possible embodiment of his invention. The scope of enablement must be commensurate with the scope of the claims. The scope of the claims must be less than or equal to the scope of enablement. See Promega v. Life Technologies Fed. Cir., December 2014, Magsil v. Hitachi Global Storage Fed. Cir. August 2012.

The term “means” was not used nor intended nor implied in the disclosed preferred best mode embodiments of the present invention. Thus, the inventor(s) has not limited the scope of the claims as mean plus function. An apparatus claim with functional language is not an impermissible “hybrid” claim; instead, it is simply an apparatus claim including functional limitations. Additionally, “apparatus claims are not necessarily indefinite for using functional language . . . [f]unctional language may also be employed to limit the claims without using the means-plus-function format.” See National Presto Industries, Inc. v. The West Bend Co., 76 F. 3d 1185 (Fed. Cir. 1996), R.A.C.C. Indus. v. Stun-Tech, Inc., 178 F.3d 1309 (Fed. Cir. 1998) (unpublished), Microprocessor Enhancement Corp. v. Texas Instruments Inc, & Williamson v. Citrix Online, LLC, 792 F.3d 1339 (2015). 

We claim:
 1. An optical switch comprising: a first optical waveguide and a second optical waveguide, wherein the first optical waveguide is less than 5 microns in horizontal width, wherein the second optical waveguide is less than 5 microns in horizontal width, wherein a section of the first optical waveguide is substantially parallel within manufacturing tolerance to a section of the second optical waveguide, wherein the section of the first optical waveguide is optically coupled with an ultra thin-film of a vertical thickness or a vertical depth less than 0.5 microns, wherein the ultra thin-film comprises: a phase transition material, wherein the phase transition material on the first optical waveguide is receiving a first stimulant, just to induce insulator-to-metal (IMT) phase transition in the phase transition material on the first optical waveguide, wherein the said insulator-to-metal (IMT) phase transition is with a change in lattice structure or without a change in lattice structure, and/or, wherein the section of the second optical waveguide is optically coupled with an ultra thin-film of a vertical thickness or a vertical depth less than 0.5 microns, wherein the ultra thin-film comprises: the phase transition material, wherein the phase transition material on the second optical waveguide is receiving a second stimulant, just to induce insulator-to-metal (IMT) phase transition in the phase transition material on the second optical waveguide, wherein the said insulator-to-metal (IMT) phase transition is with a change in lattice structure or without a change in lattice structure.
 2. The optical switch according to claim 1, wherein the horizontal width of the first optical waveguide is different than the horizontal width of the second optical waveguide.
 3. The optical switch according to claim 1, wherein a vertical thickness or a vertical depth of the first optical waveguide is different than a vertical thickness or a vertical depth of the second optical waveguide.
 4. The optical switch according to claim 1, wherein the first stimulant is selected from the group consisting of the following a first electrical pulse, a first light pulse, a first pulse in terahertz (THz) frequency of a suitable field strength and first hot electrons, wherein the first electrical pulse is a voltage pulse or a current pulse.
 5. The optical switch according to claim 1, wherein the first stimulant comprises one or more of following a first electrical pulse, a first light pulse, a first pulse in terahertz (THz) frequency of a suitable field strength and first hot electrons, wherein the first electrical pulse is a voltage pulse or a current pulse.
 6. The optical switch according to claim 1, wherein the second stimulant is selected from the group consisting of the following a second electrical pulse, a second light pulse, a second pulse in terahertz (THz) frequency of a suitable field strength and second hot electrons, wherein the second electrical pulse is a voltage pulse or a current pulse.
 7. The optical switch according to claim 1, wherein the second stimulant comprises one or more of the following a second electrical pulse, a second light pulse, a second pulse in terahertz (THz) frequency of a suitable field strength and second hot electrons, wherein the second electrical pulse is a voltage pulse or a current pulse.
 8. The optical switch according to claim 1, wherein the first optical waveguide and/or the second optical waveguide is coupled with a one-dimensional (1-D) photonic crystal.
 9. The optical switch according to claim 1, wherein the first optical waveguide and/or the second optical waveguide is coupled with a two-dimensional (2-D) photonic crystal.
 10. The optical switch according to claim 1, wherein the phase transition material comprises one or more segments, wherein the one segment has a separate electrical bias electrode.
 11. The optical switch according to claim 1, wherein the phase transition material is a Mott insulator.
 12. The optical switch according to claim 1, wherein the phase transition material is stoichiometric undoped vanadium dioxide or doped vanadium dioxide.
 13. The optical switch according to claim 1, wherein the phase transition material is on a low optical loss semiconductor material or an insulator material.
 14. The optical switch according to claim 1, wherein the ultra thin-film comprises gratings of the phase transition material.
 15. The optical switch according to claim 1, further comprising directionally coupled optical waveguides or a multimode interference (MMI) coupler or a Mach-Zehnder (MZ) interferometer.
 16. The optical switch according to claim 1, further comprising coupling with a wavelength multiplexer or a wavelength demultiplexer.
 17. The optical switch according to claim 1, further comprising coupling with a wavelength tunable multiplexer or a wavelength tunable demultiplexer.
 18. The optical switch according to claim 1, further comprising coupling with a wavelength tunable photonic crystal multiplexer or a wavelength tunable photonic crystal demultiplexer.
 19. The optical switch according to claim 1, further comprising coupling with an optical add-drop subsystem or an optical filter.
 20. The optical switch according to claim 1, further comprising coupling with a ring resonator or a laser.
 21. The optical switch according to claim 1, further comprising coupling with a wavelength converter.
 22. The optical switch according to claim 21, comprising the wavelength converter, wherein the wavelength converter comprises As₂S₃ chalcogenide material or two-dimensional (2-D) photonic crystal As₂S₃ chalcogenide material or graphene on two-dimensional (2-D) photonic crystal silicon optical waveguide.
 23. The optical switch according to claim 21, further comprising the wavelength converter, wherein the wavelength converter comprises a semiconductor optical amplifier (SOA) or a quantum dot based semiconductor optical amplifier (QD-SOA).
 24. The optical switch according to claim 1, further comprising coupling with a semiconductor optical amplifier (SOA) or a quantum dot based semiconductor optical amplifier (QD-SOA) or an erbium doped waveguide amplifier.
 25. The optical switch according to claim 1, further comprising coupling with a nanoscaled modulator of lithium niobate (LiNbO₃).
 26. The optical switch according to claim 1, further comprising coupling with a light slowing component or a light stopping component, wherein the light slowing component or the light stopping component comprises metamaterials of negative refractive index or nanostructures.
 27. The optical switch according to claim 1, comprises a gradually tapered waveguide for waveguide to optical fiber coupling.
 28. The optical switch according to claim 1, comprises vertically coupled gratings for waveguide to optical fiber coupling.
 29. The optical switch according to claim 1, is flip-chip mounted on a nanoscaled fin array and/or a heat dissipating substrate, wherein the nanoscaled fin array comprises an array of nanoscaled metal pillars embedded in a thermally conducting thin-film.
 30. The optical switch according to claim 1, is temperature controlled by a thermoelectric cooler (TEC).
 31. An optical switch comprising: a first optical waveguide, a second optical waveguide and a third waveguide, wherein the first optical waveguide is less than 5 microns in horizontal width, wherein the second optical waveguide is less than 5 microns in horizontal width, wherein the third optical waveguide is less than 5 microns in horizontal width, wherein a section of the first optical waveguide is substantially parallel within manufacturing tolerance to a section of the second optical waveguide, wherein a section of the second optical waveguide is substantially parallel within manufacturing tolerance to a section of the third optical waveguide, wherein the section of the second optical waveguide is optically coupled with an ultra thin-film of a vertical thickness or a vertical depth less than 0.5 microns, wherein the ultra thin-film on the second optical waveguide comprises: a phase transition material, wherein the phase transition material on the second optical waveguide is receiving a stimulant, just to induce insulator-to-metal (IMT) phase transition in the phase transition material on the second optical waveguide, wherein the said insulator-to-metal (IMT) phase transition is with a change in lattice structure or without a change in lattice structure.
 32. The optical switch according to claim 31, wherein the horizontal width of the first optical waveguide is different than the horizontal width of the second optical waveguide.
 33. The optical switch according to claim 31, wherein the horizontal width of the second optical waveguide is different than the horizontal width of the third optical waveguide.
 34. The optical switch according to claim 31, wherein a vertical thickness or a vertical depth of the first optical waveguide is different than a vertical thickness or a vertical depth of the second optical waveguide.
 35. The optical switch according to claim 31, wherein a vertical thickness or a vertical depth of the second optical waveguide is different than a vertical thickness or a vertical depth of the third optical waveguide.
 36. The optical switch according to claim 31, wherein the stimulant is selected from the group consisting of the following an electrical pulse, a light pulse, a pulse in terahertz (THz) frequency of a suitable field strength and hot electrons, wherein the electrical pulse is a voltage pulse or a current pulse.
 37. The optical switch according to claim 31, wherein the stimulant comprises one or more of the following an electrical pulse, a light pulse, a pulse in terahertz (THz) frequency of a suitable field strength and hot electrons, wherein the electrical pulse is a voltage pulse or a current pulse.
 38. The optical switch according to claim 31, wherein the first optical waveguide and/or the second optical waveguide and/or third optical waveguide is coupled with a one-dimensional (1-D) photonic crystal.
 39. The optical switch according to claim 31, wherein the first optical waveguide and/or the second optical waveguide and/or third optical waveguide with a two-dimensional (2-D) photonic crystal.
 40. The optical switch according to claim 31, wherein the phase transition material comprises one or more segments, wherein the one segment has a separate electrical bias electrode.
 41. The optical switch according to claim 31, wherein the phase transition material is a Mott insulator.
 42. The optical switch according to claim 31, wherein the phase transition material is stoichiometric undoped vanadium dioxide or doped vanadium dioxide.
 43. The optical switch according to claim 31, wherein the phase transition material is on a low optical loss semiconductor material or an insulator material.
 44. The optical switch according to claim 31, wherein the ultra thin-film comprises gratings of the phase transition material.
 45. The optical switch according to claim 31, further comprising directionally coupled optical waveguides or a multimode interference (MMI) coupler.
 46. The optical switch according to claim 31, further comprising coupling with a wavelength multiplexer or a wavelength demultiplexer.
 47. The optical switch according to claim 31, further comprising coupling with a wavelength tunable multiplexer or a wavelength tunable demultiplexer.
 48. The optical switch according to claim 31, further comprising coupling with a wavelength tunable photonic crystal multiplexer or a wavelength tunable photonic crystal demultiplexer.
 49. The optical switch according to claim 31, further comprising coupling with an optical add-drop subsystem or an optical filter.
 50. The optical switch according to claim 31, further comprising coupling with a ring resonator or a laser.
 51. The optical switch according to claim 31, further comprising coupling with a wavelength converter.
 52. The optical switch according to claim 51, comprising the wavelength converter, wherein the wavelength converter comprises As₂S₃ chalcogenide material or two-dimensional (2-D) photonic crystal As₂S₃ chalcogenide material or graphene on two-dimensional (2-D) photonic crystal silicon optical waveguide.
 53. The optical switch according to claim 51, further comprising the wavelength converter, wherein the wavelength converter comprises a semiconductor optical amplifier (SOA) or a quantum dot based semiconductor optical amplifier (QD-SOA).
 54. The optical switch according to claim 31, further comprising coupling with a semiconductor optical amplifier (SOA) or a quantum dot based semiconductor optical amplifier (QD-SOA) or an erbium doped waveguide amplifier.
 55. The optical switch according to claim 31, further comprising coupling with a nanoscaled modulator of lithium niobate (LiNbO₃).
 56. The optical switch according to claim 31, further comprising coupling with a light slowing component or a light stopping component, wherein the light slowing component or the light stopping component comprises metamaterials of negative refractive index or nanostructures.
 57. The optical switch according to claim 31, comprises a gradually tapered waveguide for waveguide to optical fiber coupling.
 58. The optical switch according to claim 31, comprises vertically coupled gratings for waveguide to optical fiber coupling.
 59. The optical switch according to claim 31, is flip-chip mounted on a nanoscaled fin array and/or a heat dissipating substrate, wherein the nanoscaled fin array comprises an array of nanoscaled metal pillars embedded in a thermally conducting thin-film.
 60. The optical switch according to claim 31, is temperature controlled by a thermoelectric cooler (TEC).
 61. An optical switch comprising: a first optical waveguide and a second optical waveguide, wherein the first optical waveguide is less than 5 microns in horizontal width, wherein the second optical waveguide is less than 5 microns in horizontal width, wherein a section of the first optical waveguide is substantially parallel within manufacturing tolerance to a section of the second optical waveguide, wherein the section of the first optical waveguide is optically coupled with an ultra thin-film of a vertical thickness or a vertical depth less than 0.5 microns, wherein the ultra thin-film comprises: a phase transition material, wherein the phase transition material comprises one or more segments, wherein the one segment has a separate electrical bias electrode, wherein the phase transition material on the first optical waveguide is receiving a first stimulant, just to induce insulator-to-metal (IMT) phase transition in the phase transition material on the first optical waveguide, wherein the said insulator-to-metal (IMT) phase transition is with a change in lattice structure or without a change in lattice structure, and/or, wherein the section of the second optical waveguide is optically coupled with an ultra thin-film of a vertical thickness or a vertical depth less than 0.5 microns, wherein the ultra thin-film comprises: the phase transition material, wherein the phase transition material is segmented, wherein each segment has a separate electrical bias electrode, wherein the phase transition material on the second optical waveguide is receiving a second stimulant, just to induce insulator-to-metal (IMT) phase transition in the phase transition material on the second optical waveguide, wherein the said insulator-to-metal (IMT) phase transition is with a change in lattice structure or without a change in lattice structure.
 62. The optical switch according to claim 61, wherein the horizontal width of the first optical waveguide is different than the horizontal width of the second optical waveguide.
 63. The optical switch according to claim 61, wherein a vertical thickness or a vertical depth of the first optical waveguide is different than a vertical thickness or a vertical depth of the second optical waveguide.
 64. The optical switch according to claim 61, wherein the first stimulant is selected from the group consisting of the following a first electrical pulse, a first light pulse, a first pulse in terahertz (THz) frequency of a suitable field strength and first hot electrons, wherein the first electrical pulse is a voltage pulse or a current pulse.
 65. The optical switch according to claim 61, wherein the first stimulant comprises one or more of following a first electrical pulse, a first light pulse, a first pulse in terahertz (THz) frequency of a suitable field strength and first hot electrons, wherein the first electrical pulse is a voltage pulse or a current pulse.
 66. The optical switch according to claim 61, wherein the second stimulant is selected from the group consisting of the following a second electrical pulse, a second light pulse, a second pulse in terahertz (THz) frequency of a suitable field strength and second hot electrons, wherein the second electrical pulse is a voltage pulse or a current pulse.
 67. The optical switch according to claim 61, wherein the second stimulant comprises one or more of the following a second electrical pulse, a second light pulse, a second pulse in terahertz (THz) frequency of a suitable field strength and second hot electrons, wherein the second electrical pulse is a voltage pulse or a current pulse. 